ቢో Z0=50Ω หゲ᭴ㅧ䈱䉴䊒䊥䊮䉫䊒䊨䊷䊑╬ଔ࿁〝䊝䊂䊦
Complete Z䋰=50 ohm Coaxial Spring Probe Equivalent-circuit model
Ꮉ᧛㩷 㩷 ⦟
Makoto Kawamura
ᩣᑼળ␠䉣䉴䍃䉟䊷䍃䉝䊷䊦
᭎ⷐ㧦 SHF Ꮺ㜞ㅦାภࠍᛒ߁ LSI ߩታⵝ⸳⸘ߦߪ HSPICE ╬ߢߩ੐೨ࠪࡒࡘ࡟࡯࡚ࠪࡦ߇ᰳ߆ߖߥߊ
ߥߞߡ޿ࠆ‫ޕ‬IC ࠰ࠤ࠶࠻ࠍ฽ࠎߛ࿁〝෸߮࿁〝㈩✢ߩหゲࠪࡒࡘ࡟࡯࡚ࠪࡦߩⷐ᳞ߦᔕ߃ࠆὑߦ‫ޔ‬
㧝ࡒ࡝ࡔ࡯࠻࡞ࡇ࠶࠴หゲ᭴ㅧ࠰ࠤ࠶࠻ߦ⚵ߺㄟ߹ࠇߚหゲࠬࡊ࡝ࡦࠣࡊࡠ࡯ࡉ(MD102-00 ૶↪)
ߩ㧿ࡄ࡜ࡔ࡯࠲ࠍࡀ࠶࠻ࡢ࡯ࠢࠕ࠽࡜ࠗࠩࠍ↪޿ߡ᷹ቯߒ‫ޔ‬ฃേ⚛ሶߦࠃߞߡ᭴ᚑߐࠇࠆ╬ଔ࿁〝
෸߮ߘߩࡄ࡜ࡔ࡯࠲ࠍ 10GHz ߹ߢߩ▸࿐ߦ⛉ࠅ᳞߼ߡ޿ࠆ‫ޕ‬
㧿ࡄ࡜ࡔ࡯࠲᷹ቯ
㧿ࡄ࡜ࡔ࡯࠲ߪ‫ ߩ␠࡯ࠫࡠࡁࠢ࠹࠻ࡦ࡟ࠫࠕޔ‬PNA ࠪ࡝࡯࠭ࡀ࠶࠻ࡢ࡯ࠢࠕ࠽࡜ࠗࠩࠍ૶↪ߒ
࿑ 1 ߦ␜ߔ᭽ߥ࡞࡯ࡊ᷹ቯߦࠃࠅหゲࡊࡠ࡯ࡉࠦࡦ࠲ࠢ࠻ߩ᷹ቯࠍⴕߞߚ‫ޕ‬
᷹ቯߦߪ‫ޔ‬ቢోหゲࡊࡠ࡯ࡉ᭴ㅧߩ IC ࠰ࠤ࠶࠻ߣห৻ߩ᭴ㅧߢหゲࠦࡦ࠲ࠢ࠻ࠍ㈩⟎ߒᣢ⍮ߩ
․ᕈࠍᜬߞߚ᷹ቯࠫࠣߣవ┵ߢࡈ࡞㧞ࡐ࡯࠻ᩞᱜน⢻ߥ GGB ␠⵾ߩ᷹ቯ↪ࡇࠦࡊࡠ࡯ࡉࠍ૶↪
ߒߚ‫ޕ‬
⵾ ຠ 䈫 ห ৻㩷 ᭴ ㅧ
ห ゲ ᭴㩷 ㅧ
ⵍ ᷹ ቯ 䍪 䍽㩷 䍹 䍎 䍪 䍼
᷹ ቯ 䊘 㪈䊷㩷 䊃
᷹ ቯ 䊘 㪉䊷㩷 䊃
࿑ 㧝 5㧦㩔 㩩 㩡 㩜 㨺 㩊 ߩ ᷹ ቯ
╬ଔ࿁〝ߩᦨㆡൻ
࿑ 1 ߦ␜ߔᣇᴺߢ㧿ࡄ࡜ࡔ࡯࠲᷹ቯࠍⴕ޿‫ߩߘޔ‬ታ᷹୯ࠍ࿁〝ࠪࡒ࡟࡯࡚ࠪࡦ࠰ࡈ࠻࠙ࠚࠕ(ࠕࠫ
࡟ࡦ࠻␠⵾ ADS)ߦขࠅㄟߺ‫ޔ‬࿑ 2 ߦ␜ߔ╬ଔ࿁〝ࠍ૶↪ߒߡฦฃേ⚛ሶቯᢙߩᦨㆡൻࠍⴕߞߚ‫ޕ‬
࿑ 2 ߪ᷹ቯᣇᴺߦวࠊߖߡࠦࡦ࠲ࠢ࠻㧞ᧄಽߩ╬ଔ࿁〝ࠍ␜ߒߡ޽ࠆߚ߼Ꮐฝኻ⒓ߣߥߞߡ߅ࠅ߹
ߚ⋧ኻߔࠆ⚛ሶ߽ห୯ߣߥࠆ‫ޕ‬
࿑ 2㧦╬ଔ࿁〝ࡕ࠺࡞
ᦨㆡൻ⚿ᨐ
ታ᷹࠺࡯࠲ߣ਄⸥╬ଔ࿁〝ߩ ADS ࠍ૶↪ߒߚᦨㆡൻᓟߩࡄ࡜ࡔ࡯࠲ߣߒߡ⴫㧝ߩ࿁〝ቯᢙ߇
ᓧࠄࠇߚ‫ ߡߖࠊ޽ޕ‬ADS ߢߩࡈࠖ࠹ࠖࡦࠣ⚿ᨐࠍ࿑ 3 ߦ␜ߔ‫ޕ‬
C1(=C4)
C2(=C5)
C3(=C6)
R1(=R5)
R2(=R4)
R3(=R6)
L1(=L4)
L2(=L5)
L3(=L6)
0.364pF
0.001pF
0.364pF
0.005ǡ
0.01ǡ
0.005ǡ
0.317nH
0.598nH
0.317nH
⴫㧝㧦╬ଔ࿁〝ቯᢙ
Reverse Transmission, dB
Input Reflection Coefficient
ForwardTransmission, Phase
1.0
0
0.5
-50
unwrap(phase(S(3,4)))
unwrap(phase(S(1,2)))
SP.S(3,3)
SP.S(1,1)
dB(S(3,4))
dB(S(1,2))
0.0
-0.5
-1.0
-1.5
-2.0
-100
-150
-200
-2.5
-3.0
freq (10.00MHz to 10.00GHz)
-250
0
1
2
3
4
5
6
7
8
9
10
0
freq, GHz
0.5
-10
0.0
-20
-0.5
dB(S(3,3))
dB(S(1,1))
dB(S(4,3))
dB(S(2,1))
0
-1.0
-1.5
-30
4
5
6
freq, GHz
7
8
5
6
7
8
⿒䋺╬ଔ࿁〝䊝䊂䊦⚿ᨐ
-70
-3.0
3
4
9
㕍䋺ታ᷹⚿ᨐ䋨S䊌䊤䊔䊷䉴䋩
-40
-60
-2.5
2
3
freq, GHz
-50
-2.0
1
2
Reverse Refrection, dB
Froward Transmission, dB
1.0
0
1
9
10
0
1
2
3
4
5
6
7
8
9
10
freq, GHz
࿑ 3㧦ࠪࡒ࡟࡯࡚ࠪࡦ࠰ࡈ࠻࠙ࠚࠕߦࠃࠆᦨㆡൻ⚿ᨐ
10
╬ଔ࿁〝䊝䊂䊦
ታ᷹䌓䍨䍽䍵䍰䍎䍞
䉲䊚䊧䊷䉲䊢䊮࿁〝
ᤨ㑆ゲࠪࡒࡘ࡟࡯࡚ࠪࡦ
#&5 ߢ᳞߼ߚᦨㆡൻࡄ࡜ࡔ࡯࠲ࠍరߦᤨ㑆ゲࠪࡒࡘ࡟࡯࡚ࠪࡦ
6&46&6ࠍታᣉߒߚ⚿ᨐࠍ␜ߔ‫ޕ‬
౉ജࡄ࡞ࠬߩ┙ߜ਄߇ࠅߪ RUGE ߢⴕߞߡ߅ࠅߎࠇߪ߶߷ )*\ ߦ⋧ᒰߔࠆ‫ޕ‬
TDR
Vin, mV
VModelin, mV
600
600
500
500
400
300
200
100
0
Vout, mV
VModelout, mV
TDT
400
300
200
100
0
0
50
100
150
200
250
300
-100
0
㕍䋺ታ᷹⚿ᨐ䋨S䊌䊤䊔䊷䉴䋩
⿒䋺╬ଔ࿁〝䊝䊂䊦⚿ᨐ
ታ᷹䌓䍨䍽䍵䍰䍎䍞
╬ଔ࿁〝䊝䊂䊦
50
100
150
time, psec
ᤨ㑆ゲ䉲䊚䊠䊧䊷䉲䊢䊮࿁〝
time, psec
200
250
300
⠨ኤ
᷹ቯߐࠇߚ․ᕈߪ‫ޔ‬࿑ 1 ߦ␜ߐࠇࠆࠃ߁ߦ᛬ࠅ㄰ߐࠇߚ 2 ᧄߩหゲ᭴ㅧࡊࡠ࡯ࡉߩ․ᕈߢ޽ࠅ‫ޔ‬
ㅢㆊ․ᕈߩᦨᖡ୯ߪ 10GHz ㄭறߢ-0.5dB㨪-0.6dB ߣߥߞߡ޿ࠆ‫ޕ‬
ቢోหゲ᭴ㅧߩലᨐߣߒߡߪ‫ޔ‬ห৻ࡊࡠ࡯ࡉߩ㕖หゲ IC ࠰ࠤ࠶࠻ߩ᭴ㅧߦᲧߴࠆߣㅢㆊ․ᕈߢ⚂
-1dB(@10GHz)‫ޔ‬ห᭽ߦ෻኿․ᕈߢߪ-4db(@10GHz)ߩหゲൻ․ᕈᡷༀലᨐ߇⃻ࠇߡ޿ࠆ‫ ޕ‬
߹ߚ‫ᦨޔ‬ㆡൻߐࠇߚ࿁〝ቯᢙࠍ૶↪ߒߚࠪࡒࡘ࡟࡯࡚ࠪࡦߪ‫ޔ‬ታ᷹ߒߚ㧿ࡄ࡜ࡔ࡯࠲ߣߩᲧセ⚿
ᨐࠍ⷗ߡࠊ߆ࠆࠃ߁ߦ‫ޔ‬ㅢㆊ․ᕈߩታ᷹࠺࡯࠲ߣߩ೑ᓧߩ⋧㆑ߪᦨᄢߢ߽ 0.2dB ⒟ᐲߣߥߞߡ߅ࠅ
૏⋧߽฽߼ߡㆡᱜߥ⋧㑐߇ขࠇߚ⚿ᨐࠍᓧߡ޿ࠆ‫ޕ‬